SemiconductorMeasurement of Pressure Uniformity of Substrate Panel Cleaner

Application of Kitronyx's Pressure Distribution Measurement System for Substrate Panel Cleaner


The SFC4300CX sensor was applied to compare the pressure uniformity, pressure levels, and roller pressure starting positions of the rollers mounted on the substrate panel cleaner.


Verification of Roller Pressure Start Position:
The approximate position where pressure begins was verified based on the initial pressure application point. The estimated values were calculated based on the sensor's pitch size, and it was confirmed that these values closely match the set values.

Pressure Distribution Confirmation:
The pressure distribution of the roller was confirmed using the numerical results from ForceLAB2.

Expected Benefits and Applications 

1. Digitization of Pressure Distribution:
The pressure distribution can be quantified, and data storage is simplified.

2. Improvement of Production Process:
Compared to Pressure indicating film, the process can be streamlined and automated.


<Result Video>

※ The features and contents described in this document are subject to change without notice for performance improvement.

The images included are for illustrative purposes and may differ from actual results.


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